Entegris, Inc. (Entegris) supplies critical advanced materials and process solutions for the semiconductor and other high-technology industries.
Segments
The company operates through three segments: Materials Solutions (MS); Microcontamination Control (MC); and Advanced Materials Handling (AMH).
Materials Solutions Segment
MS provides complementary materials solutions around the primary modules in the semiconductor manufacturing process and in the emerging area of advanced packaging, includi...
Entegris, Inc. (Entegris) supplies critical advanced materials and process solutions for the semiconductor and other high-technology industries.
Segments
The company operates through three segments: Materials Solutions (MS); Microcontamination Control (MC); and Advanced Materials Handling (AMH).
Materials Solutions Segment
MS provides complementary materials solutions around the primary modules in the semiconductor manufacturing process and in the emerging area of advanced packaging, including deposition materials, integrated circuit CMP solutions, high-performance etch and clean chemistries, gases and materials, and safe and efficient materials delivery systems that enhance the company's customers’ product performance. The company's ability to deliver advanced materials at high purity, together with critical products like CMP slurries and pads, enables its customers’ technical roadmap, improves device performance, enhances their yields, and is critical to enabling the performance of leading-edge logic and memory devices.
Deposition and Etch Solutions: The company offers the following Deposition and Etch Solutions products:
Advanced Deposition Materials Products: The company's advanced deposition materials include ultra-pure liquid and solid precursors, including organometallic and inorganic precursors for the deposition of molybdenum, tungsten, titanium, hafnium, zirconium, aluminum, and other emerging metal and metal-based films. The company also offers organosilane precursors for the deposition of silicon oxide, silicon nitride, and advanced dielectric materials films, as well as a variety of molecules required to enable area-selective deposition applications. These precursors are designed in close collaboration with OEM process tool manufacturers and device makers to produce application-specific solutions that are compatible with complex integrations of material solutions used to build the semiconductor device. The company offers delivery systems and containers that allow for reliable storage and delivery of low volatility solid and liquid precursors required in atomic layer deposition processes.
Surface Preparation and Integration Products: The company offers a range of materials used to prepare the surface of a semiconductor wafer during the manufacturing process and to integrate with materials being used on the wafer. The company offers a broad range of cleaning solutions for applications, such as semiconductor post-etch residue removal, wafer etching, organics removal, resist removal, edge bead removal, and corrosion prevention. In addition, the company offers selective etch products designed to enable advanced architectures, such as 3D-NAND.
Dry Process Solutions: The company offers the following Dry Process Solutions products:
Specialty Gases: The company's specialty gas solutions provide advanced safety and process capabilities to semiconductor and display manufacturers. The company's SDS cylinders safely store and deliver hazardous gases, such as arsine, phosphine, germanium tetrafluoride, and boron trifluoride, at sub-atmospheric pressure through the use of its proprietary carbon-based adsorbent materials. These cylinders are designed to minimize potential leaks during transportation and use, and allow more gas to be stored, providing significant safety, environmental, and productivity benefits over traditional high-pressure cylinders. The company also offers VAC, a complementary technology to SDS, where select implant gases and gas mixtures are stored under high pressure but are delivered sub-atmospherically.
Specialty Coatings: The company's high-performance specialty coatings, such as its Pegasus and Cearus coatings, provide erosion resistance, minimize particle generation, and prevent contamination on critical components in semiconductor environments and other high-technology manufacturing operations.
Advanced Cleaning Materials: The company develops and manufactures high-performance consumable products for cleaning advanced probe cards and test sockets, designed to improve customer yields and throughput in wafer and package test operations at semiconductor device manufacturers, foundries, and outsourced semiconductor assembly and test (‘OSAT’) facilities.
Integrated Circuits (‘IC’) Polishing Solutions: The company's IC Polishing Solutions enable it to fully leverage its capabilities as a CMP solutions provider to the semiconductor industry by providing the following products:
CMP Slurries: The company develops, produces, and sells CMP slurries for polishing a wide range of materials used in semiconductor devices, including tungsten, dielectric materials, copper, barrier, aluminum, and other emerging materials used in semiconductor device fabrication.
CMP Pads: CMP pads are critical in the CMP process to flatten and polish wafers and can have a significant impact on process performance. The company's CMP Pads, such as its NexPlanar, Medea, and Ultra pad products, are designed to provide the exact hardness, pore sizes, compressibility, and groove patterns needed to meet and exceed the requirements of various CMP applications. The company's Epic Power CMP Pads are designed for SiC wafers and offer a balance of best-in-class performance, quality.
Post-CMP Cleans and Brushes: The company's post-CMP clean chemistry products, such as PlanarClean and ESC 784, are designed to efficiently remove the abrasive slurry particles and organic residue from the wafer after the CMP process, removing residue that might affect yield while not contributing to contamination. In addition, the company's consumable polyvinyl alcohol roller brush products are used to clean the wafer following the CMP process.
Advanced Materials Markets (‘AMM’): AMM focuses on developing and selling products to customers in new and emerging market areas outside of the semiconductor manufacturing process. AMM includes the company's POCO premium graphite products, used to make precision consumable electrodes for electrical discharge machining, hot glass contact materials for glass product manufacturing and forming, and other consumable products for various industrial applications, including aerospace, optical, medical devices, air bearings, and printing. It also includes the company's slurry products used for polishing bare silicon wafers and other ultra-hard surface materials, including SiC and GaN substrates, as well as disk substrates and magnetic heads used in hard disk drives, which are utilized in power electronics and advanced communications end-markets. AMM also provides specialty chemicals and specialty materials to enable advanced performance of product solutions in a wide range of end-markets, including aircraft, aerospace, wound care, and medical devices.
Advanced Purity Solutions segment
The APS segment is the segment resulting from combining the Microcontamination Control (‘MC’) segment and the Advanced Materials Handling (‘AMH’) segment, both of which offered highly complementary products with a core focus on ensuring critical materials purity. The APS segment offers solutions to ensure the purity of critical liquid chemistries, process gases, wafers, and substrates in semiconductor manufacturing processes and other high-technology industries. The company's liquid and gas filtration and purification products are critical to semiconductor manufacturing processes, including photolithography, deposition, planarization, and surface etching and cleaning, because they remove nanometer-sized contaminants, directly reduce defects, improve manufacturing yield, and enhance the long-term reliability of the semiconductor device. The company's microenvironment solutions improve its customers’ yields by ensuring the purity of wafers and protecting them from contamination and damage during manufacturing and transportation, while its fluid management solutions ensure the purity and safe delivery of advanced chemicals from the chemical manufacturer to the point-of-use in the semiconductor fab.
Liquid Microcontamination Control Products: The company offers a variety of products that control contaminants in its customers’ wet processes both in the fab environment and upstream at the chemical manufacturers. For example, the company's Torrento series of filters is used for the filtration of aggressive acid and base chemistries for both semiconductor fabs, as well as specialty chemical manufacturers, including its MS segment. Manufacturers of high-purity chemicals and semiconductor fabs use the company's Trinzik and Microgard products for the filtration of chemicals and ultra-pure water. The company's Impact series of filters are used in point-of-use photochemical dispense applications where the delivery of superior flow rate performance and reduced microbubble formation is critical. The company's Protego series of liquid purifier/filter products are used to reduce metallic contamination in chemical manufacturing and in critical wafer rinsing and drying applications by its customers. In addition, the company provides membrane and liquid filtration offerings serving semiconductor, pharmaceutical, and medical applications.
Gas Microcontamination Control Products: The company offers a broad portfolio of products designed to remove particulate and molecular contaminants from controlled environments and gas streams in semiconductor, flat panel display, and LED fabs. The company's Wafergard gas filters reduce outgassing and remove particle contamination. The company's GateKeeper gas purifiers and large facility-wide gas purification systems provide continuous purified gas supply to customer fabs from the point of creation on the gas pads to the point-of-use at the wafer by chemically reacting and absorbing contaminants, effectively removing gaseous contaminants down to part-per-trillion levels. The company's Chambergard gas diffusers provide semiconductor equipment manufacturers with the capability to rapidly vent their tools to atmosphere to dramatically reduce process cycle times without adding particles to the wafers. In addition, the company's Vaporsorb products are used to eliminate airborne molecular contamination from critical process tool areas or cleanrooms in the fab. These products are used in or alongside critical processing tools to improve yield and reduce tool downtime.
Microenvironment Solutions: The company's wafer carriers are high-purity ‘micro-environments’ that carry wafers between manufacturing process steps. Each of these microenvironments is designed to protect the safety, security, and purity of the wafers throughout the fabrication life cycle. The company leads the market for 300-millimeter FOUPs, wafer transport and process carriers, and SMIF pods for 200-millimeter wafer applications. The company's high-volume line of Ultrapak products for wafers ranging from 100 to 200 millimeters ensures the clean and secure transport of wafers from the wafer manufacturers to the semiconductor fabs. The company also offers a front-opening shipping box (‘FOSB’) for the transportation and automated interface of 300-millimeter wafers. The company's EUV reticle pod is designed to provide defect-free protection of EUV reticles during shipping, storage, handling, and vacuum-transferring operations.
Fluid Management Products: The company's broad range of fluid management solutions maximizes fab productivity, improves fab yields, and reduces cost of ownership throughout bulk chemical delivery, CMP, wet etch and clean, and lithography processes. The company's broad portfolio of packaging and container products, from low-volume containers to transport high-value photoresist chemistries, such as its NOWPak products, to large intermediate bulk containers, such as its FluoroPure products, ensures the purity of the chemistries they contain. The company is a leader in high-purity fluid handling products, such as valves, fittings, tubing, piping, and associated connection systems, such as its PrimeLock connections, for high-purity chemical applications. The company's proprietary digital flow control technology improves the uniformity of chemicals applied on wafers. For example, the company's IntelliGen integrated, high-precision liquid dispenses systems enable the uniform application of advanced chemistries during the wafer fabrication process, integrating its valve control expertise with filter device technologies, in order to conserve high-value chemistry and reduce defects on wafers. The company's instrumentation solutions ensure consistency and monitoring of complex blended chemistries, such as its on-tool Accusizer system, which performs automated online particle size and count analysis with applications in both semiconductor and life science industries, and its SemiChem systems and its Invue products, which measure chemical concentration in CMP slurries and formulated cleaning chemistries.
Customers and Markets
The company's customers include logic and memory semiconductor device manufacturers, semiconductor equipment makers, gas and chemical manufacturing companies, and wafer grower companies serving the global semiconductor industry. The company also sells its products to OSAT facilities, flat panel display equipment makers, panel manufacturers, manufacturers of hard disk drive components and devices, and their related ecosystems.
The company's other high-technology markets include manufacturers and suppliers in the solar and life science industries, electrical discharge machining customers, glass and glass container manufacturers, aerospace manufacturers, and manufacturers of biomedical implantation devices.
Sales, Marketing and Support
The company sells its products worldwide, primarily through its direct sales force and strategic independent distributors located in all major semiconductor markets. The company also uses independent distributors in other market territories and for specific market segments.
Engineering, Research and Development
The company’s engineering, research and development (‘ER&D’) expenses consist of expenses for the support of current product lines and the development of new products and manufacturing technologies. These expenses were $316.1 million in 2024.
Patents and Other Intellectual Property Rights
As of December 31, 2024, the company owned approximately 4,500 active patents worldwide, of which about 800 were U.S. patents. Additionally, the company owned about 2,300 pending patent applications globally. The company also licenses certain patents owned by third parties.
Divestitures
On March 1, 2024, the company completed the sale of its Pipeline and Industrial Materials (‘PIM’) business, to SCF Partners, Inc.
Competition
Advanced Purity Solutions: The company competes with Pall Corporation (part of Danaher Corporation); Shin-Etsu Polymer Co. Ltd.; Cobetter Filtration; Gudeng Precision Industrial; and Aicello Corporation.
Materials Solutions: The company competes with EMD Performance Materials division of Merck KGaA; Electronics & Industrial division of DuPont de Nemours, Inc.; Electronics Advanced Materials division of Air Liquide; Linde plc; Anji Microelectronics (Shanghai) Co., Ltd.; and Mersen.
History
Entegris, Inc. was founded in 1966. The company was incorporated in 2005.